A Real-Time Circuit Phase Delay Correction System for MEMS Vibratory Gyroscopes

With the development of designing and manufacturing level for micro-electromechanical system (MEMS) gyroscopes, control circuit has become a key point to determine their internal performance. Nevertheless, phase delay electronic components may result in some serious hazards. This study described real-time correction MEMS vibratory gyroscopes. A detailed theoretical analysis was provided clarify influence on in-phase quadrature (IQ) coupling characteristics zero-rate output (ZRO) utilizing force-to-rebalance (FTR) closed-loop detection system. By deducing relationship between amplitude-frequency, phase-frequency gyroscope, whole loop, proposed automatically adjust reference value phase-locked loop (PLL) thus compensate delay. The experimental results showed that can accurately measure real time. Furthermore, unwanted IQ be eliminated ZRO decreased by 755% 0.095°/s. realized small angle random walk 0.978°/?h low bias instability 9.458°/h together with scale factor nonlinearity 255 ppm at room temperature. thermal drift reduced 0.0034°/s/°C temperature range from ?20 70 °C.